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Micro-spectrophotometer based on micro electro-mechanical systems technology
ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang
Frontiers of Mechanical Engineering 2008, Volume 3, Issue 1, Pages 37-43 doi: 10.1007/s11465-008-0001-x
Keywords: mini-spectrophotometer referenced micro-silicon-fixer electro-mechanical correlation coefficient
Stiction and Friction in Micro Electro Mechanical Systems
Wang Weiyuan
Strategic Study of CAE 2000, Volume 2, Issue 3, Pages 36-41
The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.The stiction, called release-related stiction, can occur within micron gaps of Si microstuctures during the etching of sacrifacial layer by HF and drying. It can also occur after packaging of the device due to over range of input signals and is called in-use stiction. It is concluded that the capillary force of water between two Si hydrophilic surfaces at separation gap of micron is the major contributor to the release-related stiction. The origin of in-use adhesion is from the chemical state of Si surface. Coating of anti-stiction films on the surface of Si microstructures and packaging of devices under dry atmosphere or vacuum are the most important methods to prevent the in MEMS devices from stiction. The preparation technology of anti-stiction films and its problems are described. Comparing with stiction, the friction is more complex. The commercially produced accelerometers and digital mirror devices are the devices with no direct contact friction. After using anti-stiction films, the stiction is fully prevented, and even the friction is apparently decreased. However, friction still exists in MEMS of direct contact moving parts. The wear resoluted from friction will decrease the reliability and lifetime of the devices. To fabricate the films with anti-stiction and wear-resitsting ability are the key research projects in high speed moving MEMS devices.
Keywords: micro electro mechanical systems stiction friction anti-stiction films wear-resisting films
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2, Pages 146-149 doi: 10.1007/s11465-013-0260-z
To predict more precisely the frequency of force-balanced micro accelerometer with different biasBased on the theoretical results, micro accelerometer is fabricated and tested to study the influences
Keywords: Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency
Frontiers of Mechanical Engineering 2023, Volume 18, Issue 2, doi: 10.1007/s11465-023-0747-1
Keywords: micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical
Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for Research Article
Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn
Frontiers of Information Technology & Electronic Engineering 2022, Volume 23, Issue 5, Pages 801-809 doi: 10.1631/FITEE.2100236
Keywords: Bending structure surfaces Flexible accelerometer Micro-electro-mechanical system (MEMS) technology
Liang ZHAO, Linhua LIU,
Frontiers in Energy 2009, Volume 3, Issue 4, Pages 381-388 doi: 10.1007/s11708-009-0057-2
Keywords: closed-end micro-channel electrical double layer electro-osmotic flow induced pressure gradient Joule
Wang Weiyuan,Wang Yuelin
Strategic Study of CAE 2002, Volume 4, Issue 6, Pages 56-62
The packaging of micro electro mechanical systems (MEMS) is referred to first-level packaging andIt is used to seal micro channel or micro hole to form a vacuum or low-pressure cavity or protect fromThe commercialized pressure sensors, accelerometers, digital micro mirror devices, etc., collected from
Keywords: packaging of MEMS bulk silicon bonding technology film-sealed technology
Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing
Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang
Frontiers of Engineering Management 2016, Volume 3, Issue 2, Pages 115-122 doi: 10.15302/J-FEM-2016019
Keywords: electro-mechanical products active remanufacturing optimal timing reverse logistics recycling mode
Recent advances in micro- and nano-machining technologies
Shang GAO, Han HUANG
Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1, Pages 18-32 doi: 10.1007/s11465-017-0410-9
Keywords: micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB)
Special issue: Micro-electromechanical systems (MEMS)
Zhuangde JIANG
Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4, Pages 457-458 doi: 10.1007/s11465-017-0492-4
Frontiers of Structural and Civil Engineering 2021, Volume 15, Issue 4, Pages 1047-1057 doi: 10.1007/s11709-021-0755-3
Keywords: magnesium phosphate cement-based concrete micro-steel fibers four-point flexural strength compressive
Performance analysis of cogeneration systems based on micro gas turbine (MGT), organic Rankine cycle
Zemin BO, Kai ZHANG, Peijie SUN, Xiaojing LV, Yiwu WENG
Frontiers in Energy 2019, Volume 13, Issue 1, Pages 54-63 doi: 10.1007/s11708-018-0606-7
Keywords: cogeneration system different working fluids micro gas turbine (MGT) organic Rankine cycle (ORC) ejector
Rainer HORN, Winfried E. H. BLUM
Frontiers of Agricultural Science and Engineering 2020, Volume 7, Issue 3, Pages 243-245 doi: 10.15302/J-FASE-2020334
Francesco PENTA,Cesare ROSSI,Sergio SAVINO
Frontiers of Mechanical Engineering 2016, Volume 11, Issue 2, Pages 184-194 doi: 10.1007/s11465-016-0385-y
This study aims to optimize the geometrical parameters of an under-actuated mechanical finger by conducting
Keywords: tendon-driven fingers mechanical finger design under-actuated mechanical systems
Strengthening of polysulfone membranes using hybrid mixtures of micro- and nano-scale modifiers
Peyman P. Selakjani, Majid Peyravi, Mohsen Jahanshahi, Hamzeh Hoseinpour, Ali S. Rad, Soodabeh Khalili
Frontiers of Chemical Science and Engineering 2018, Volume 12, Issue 1, Pages 174-183 doi: 10.1007/s11705-017-1670-y
Keywords: polysulfone membrane mechanical properties micro- and nano-modification binary and ternary system dye
Title Author Date Type Operation
Micro-spectrophotometer based on micro electro-mechanical systems technology
ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang
Journal Article
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
Journal Article
A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow
Journal Article
Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for
Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn
Journal Article
Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective
Liang ZHAO, Linhua LIU,
Journal Article
Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology
Wang Weiyuan,Wang Yuelin
Journal Article
Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing
Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang
Journal Article
Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate
Journal Article
Performance analysis of cogeneration systems based on micro gas turbine (MGT), organic Rankine cycle
Zemin BO, Kai ZHANG, Peijie SUN, Xiaojing LV, Yiwu WENG
Journal Article
Effect of land-use management systems on coupled physical and mechanical, chemical and biological soil
Rainer HORN, Winfried E. H. BLUM
Journal Article
Analysis of suitable geometrical parameters for designing a tendon-driven under-actuated mechanical finger
Francesco PENTA,Cesare ROSSI,Sergio SAVINO
Journal Article